JPS625646Y2 - - Google Patents

Info

Publication number
JPS625646Y2
JPS625646Y2 JP1978132851U JP13285178U JPS625646Y2 JP S625646 Y2 JPS625646 Y2 JP S625646Y2 JP 1978132851 U JP1978132851 U JP 1978132851U JP 13285178 U JP13285178 U JP 13285178U JP S625646 Y2 JPS625646 Y2 JP S625646Y2
Authority
JP
Japan
Prior art keywords
axis
face plate
moving mechanism
axis moving
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1978132851U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5549240U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978132851U priority Critical patent/JPS625646Y2/ja
Publication of JPS5549240U publication Critical patent/JPS5549240U/ja
Application granted granted Critical
Publication of JPS625646Y2 publication Critical patent/JPS625646Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1978132851U 1978-09-29 1978-09-29 Expired JPS625646Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978132851U JPS625646Y2 (en]) 1978-09-29 1978-09-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978132851U JPS625646Y2 (en]) 1978-09-29 1978-09-29

Publications (2)

Publication Number Publication Date
JPS5549240U JPS5549240U (en]) 1980-03-31
JPS625646Y2 true JPS625646Y2 (en]) 1987-02-09

Family

ID=29100779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978132851U Expired JPS625646Y2 (en]) 1978-09-29 1978-09-29

Country Status (1)

Country Link
JP (1) JPS625646Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53107865A (en) * 1977-03-02 1978-09-20 Hitachi Ltd Detector of minute undulations

Also Published As

Publication number Publication date
JPS5549240U (en]) 1980-03-31

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